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ITN 522 - Introduction to Micro and Nano Fabrication

Instructor: Assoc.Prof.Feridun AY
Teaching Assistants:
Course Book: Sami Franssila, “Introduction to Microfabrication”, Wiley, 2010
Grading: Midterm Exam: 20%; Final Exam: 40%; Homework Assignments & Presentations: 40%
Other Resources: Stephen A. Campbell, Fabrication Engineering at the Micro- and Nanoscale, Oxford Series in Electrical and Computer Engineering, 2012
Course Outline:
1. Week

Lecture 01:  Introduction & Motivation


Note - The presentation slides are password protected. The password will be handed in during the lectures.

2. Week

Lecture 02:  Cleanroom Environment, Safety and Processing Overview (The Lecture starts at 09:30)



3. Week

Lecture 03:  Micrometrology and Materials Characterization I 

(The Lecture starts at 09:30)


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