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ITN 522 - Introduction to Micro and Nano Fabrication

Instructor: Assoc.Prof.Feridun AY
Teaching Assistants:
Course Book: Sami Franssila, “Introduction to Microfabrication”, Wiley, 2010
Grading: Midterm Exam: 20%; Final Exam: 40%; Homework Assignments & Presentations: 40%
Other Resources: Stephen A. Campbell, Fabrication Engineering at the Micro- and Nanoscale, Oxford Series in Electrical and Computer Engineering, 2012
Course Outline:
1. Week

Lecture 01:  Introduction & Motivation


Note - The presentation slides are password protected. The password will be handed in during the lectures.

2. Week

Lecture 02:  Cleanroom Environment, Safety and Processing Overview (The Lecture starts at 09:30)



3. Week

Lecture 03:  Micrometrology and Materials Characterization I 

(The Lecture starts at 09:30)


4. Week

5. Week

Lecture 04:  Silicon


6. Week

Midterm Exam

(starts at 09:30 on 20/03/2018)


7. Week

Lecture 05:  Thin-Film Materials and Processes: PVD, CVD, PECVD, ALD…


8. Week

Lecture 06:  Micro and Nano Fabrication


9. Week

Lecture 07:  Fundamentals of Nanomechanics by Feodor M. Borodich

The Lectures will take place at the Department of Mathematics (Fen Fakültesi, Yunus Emre Kampüsü), 09:00

10. Week

Final EXAM

Date: 22/05/2018 Tuesday

Time: 09:30-11:30

Place: EEM Meeting Room (same as for the lectures)


  • There will be no questions from the presentations or the nanomechanics part.
  • All the problems will be from the book.
  • In total 5 problems.
  • You can use the book from your computer (only the book,  no notes etc.).



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