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EEM 621 - Nano and Micro-Fabrication Techniques

Instructor: Assoc.Prof.Feridun AY
Teaching Assistants:
Course Book: 1) Sami Franssila, “Introduction to Microfabrication”, Wiley, 2010 2) Richard C. Jaeger, “Introduction to Microelectronic Fabrication: Volume 5 of Modular Series on Solid State Devices, 2/E”, Prentice Hall, 2001
Grading: Midterm Exam: 20%; Final Exam: 40%; Homework Assignments & Presentations: 40%
Other Resources: 1) Chang Liu, “Foundation of MEMS: International Edition, 2/E”, Prentice Hall, 2011; 2) Chenming Hu, "Modern Semiconductor Devices for Integrated Circuits", Prentice Hall, 2010;
Course Outline:
1. Week

Lecture 01: History of Integrated Circuits: Introduction and Motivation


Note - The presentation slides are password protected. You can obtain the password only during the lectures.


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